Research Facilities
Angle Resolved Light Scattering
This angle resolved mode of light scattering is a result we learned from the extensive use of electron diffraction measurement and theory developed by Dr. H.-N. Yang. For details see our book and our following publications:
- "Measurement of Roughness Exponent for Very Rough Surfaces Using Angle Resolved Light Scattering," K. Fang, R. Adame, H.-N. Yang, G.-C. Wang, and T.-M. Lu, Appl. Phys. Lett. 66, 2077 (1995).
- "Noise-Induced Roughening Evolution of Amorphous Si Films Grown by Thermal Evaporation," H.-N. Yang, Y.-P. Zhao, G.-C. Wang, and T.-M. Lu, Phys. Rev. Lett. 76, 3774 (1996).
- "Extraction of Real Space Correlation Function of a Rough Surface by Light Scattering Using Diode Array Detectors," Y.-P. Zhao, H.-N. Yang, G.-C. Wang, and T.-M. Lu, Appl. Phys. Lett. 68, 3063 (1996).
- "In Situ Real Time Study of Chemical Etching Process of Si(100) Using Light Scattering," Y.-P. Zhao, Y.-J. Wu (National Taiwan Ocean University), H.-N. Yang, G.-C, Wang, and T.-M. Lu, Appl. Phys. Lett. 69, 221 (1996).
- "Characterization of random rough surfaces by in-plane light scattering, " Y.-P. Zhao, Irene Wu, C.-F. Cheng, Ueyn Block, G.-C. Wang, and T.-M. Lu, to appear in J. Appl. Phys (1998).
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