David C. King
General Manager, Micro and Nano Fabrication Clean Room
Center for Integrated Electronics (CIE)
Rensselaer Polytechnic Institute
The CIE at Rensselaer supports a number of interdisciplinary research
projects in microelectronics, nanotechnology, biotechnology and MEMS. CIE
operates a 5700 square foot Class 100 clean room with a 2um CMOS baseline
process and the capability to make patterns as small as 20nm. The tools in
the clean room are currently configured for silicon wafer sizes up to
200mm. A complete suite of commercial CAD and simulation tools is also
available.
Anyone interested in using CIE's facilities may obtain more information
from me at kingdc@rpi.edu
More Information about Dave King
Office: CII 4167
Telephone: (518) 276-2938
Fax: (518) 276-8761
Electronic Mail: kingdc@rpi.edu